Actuating and sensing using piezoelectric cantilever. Precision position control of piezoelectric actuators. As such, applications needing larger displacements need an efficient mechanism for trading some of this large force for a larger amplified motion. In this paper, we investigate selfsensing actuators applied in direct acing proportional valves. Therefore, in the electrical domain the piezo element may be seen as a capacitor c p in series with a voltage source, of which the voltage is induced by the external forces acting on the piezo element. A resonant piezoelectric transducer system has the advantage of low driving voltage. Current measurement can be used to estimate the selfheating of periodically actuated. Study on displacement selfsensing of piezoelectric actuator. Titan amplified piezoelectric actuators qortek, inc. When a sinusoidal voltage is applied on the actuating layer of the bimorph, the output voltage of the sensing layer appears as interharmonic component signal. Variable stiffness actuator is the essential element for force control and motion generation of most mechanical systems that are used for soft robotic, biomimetic and biomedical applications.
Actuating and sensing using piezoelectric cantilever author. Active vibration control of a microactuator for the hard. Index termsselfsensing, piezoelectric actuator, displacement and force. Selfsensing actuators with passive damping for adaptive. A theoreti cal basis for the selfsensing actuator is given in terms of the electromechanical consti tutive equations for a piezoelectric material. Simultaneous quasistatic displacement and force self. Modelbased fault diagnosis in rotor systems with self.
Modeling of the sma actuator is described in section 4. A piezoelectric selfsensing actuator ssacan reduce the cost of the active vibration control system and simplify the stru cture by eliminating the use of a sensor, because. This selfsensing approach enables to control the deflection of a loaded piezoelectric cantilever operated in a wide frequency band. This paper aims to make piezoelectric ceramic actuator selfsense its own displacement in the absence of independent sensor. A piezo controller or driver is used to control the motion of a piezo positioning device. Thereby, the determination of the applied load impedances becomes. The interharmonic frequency is noninteger harmonic frequency of the applied voltage. Piezoelectric selfsensing actuator for active vibration.
Selfsensing piezoelectric actuator using permittivity. So a displacement selfsensing method based on integrate circuit is presented. Variable flux, dc bus voltage control, and selfsensing for flux intensifying ipmsm. A piezoelectric bimorph cantilevered beam is analyzed dynamically by a longitudinal and transverse coupling theory. A selfsensing piezoelectric actuator for collocated control. In this article, improvement of this method is described. A new concept of a selfsensing bending actuator is introduced. Engineers can now use standard optical components and offtheshelf nanopositioners to build a highquality atomic force microscope. Selfsensing piezoelectric actuators with adaptive mechanisms w w law, wh liao and j huangintegral feedback control of a selfsensing magnetostrictive actuator k kuhnen, m schommer and h janochaa comprehensive model for piezoceramic actuators. Active damping of a piezoelectric tube scanner using self.
One example of a feedback controller used to control a piezoelectric actuator can be seen in 11. By connecting the piezoelectric element in a capacitive bridge circuit, as first described in, the sensing capabilities can be combined. Implementation and evaluation of noninjection based flux tracking selfsensing for spmsms from zero to high speeds using. Journal of intelligent material systems and structures, 1992, 3 1. Us patent for actively sensing and cancelling vibration in. However, nonlinear effects such as hysteresis and creep affect the position accuracy of the systems if not compensated. Experiments are carried out using 2 peas in an experimental setup. With its small size and innovative advanced power technology, this amplifier requires less bench space than comparable products while producing the. Piezoelectric nanopositioners forge lowcost atomic force microscope. Using the concept of selfsensing, piezoelectric actuators were used to damp beam vibrations7,8. The motivation behind the technique is that such a selfsensing actuator will be truly collocated and has applications in active and intelligent structures, such as vibration suppression.
Improving the magnetic flux linkagebased power loss model for an hev boost converter. Mechanical systems when integrated with smart materials enable controlled variation of stiffness in addition to control of force and displacement, thus. Dynamical model for an interharmonic property of a. Inman2 mechanical systems laboratory department of mechanical and aerospace engineering 1012 furnas hall state university of new york at buffalo buffalo, ny 14260 ephrahim garcia3 department of mechanical engineering vanderbilt university nashville, tn 37203 abstract. Actuator 10 12th international conference on new actuators. If the capacitance of a piezoelectric device is known 4, applying the same voltage to a capacitor of the same value and subtracting its electrical response from that of the piezoelectric yields the. Schittera,b, a delft center for systems and control, precision and microsystems engineering, delft university of technology, mekelweg 2, 2628cd delft, the netherlands bautomation and control institute, vienna university of technology, gusshausstrasse 2729, 1040 vienna, austria. Section 3 explains the selfsensing property of the sma actuator. A selfsensing method the same piezoelectric actuator is used as sensor and actuator at the same time is implemented for bonding process monitoring purpose and feedback control purpose. Selfsensing with loaded piezoelectric bending actuators. This detection model is used to replace a force sensor for closedloop force control of a pea. Multilayer piezoelectric actuators are ceramic elements used to convert electrical energy into mechanical energy such as displacement or force by utilizing the piezoelectric longitudinal effect.
An embodiment of an assembly includes a platform e. Selfsensing force control of a piezoelectric actuator ieee xplore. This allows using a piezo element as a force sensor. Development of a piezoelectric static force sensor for automation assembly systems. Active damping of a piezoelectric tube scanner using selfsensing piezo actuation s. A piezoelectric selfsensing actuator is a piezoelectric transducer used simultaneously as a sensor and an actuator. To this day batteries serve as the most common power source for remote wireless systems. Control of an experimental piezoelectric actuators system. Often, feedback position sensors are mounted to the systems to eliminate hysteresis and creep. A model pea is proposed that includes a new asymmetric hysteresis operator and that takes the external force into account. Piezoelectric ceramic actuators are widely used in micronanopositioning systems due to expedient characteristics such as fast response time, high stiffness, high resolution, etc.
Combined sensor and actuator functions selfsensing and collocated control piezoelectric materials for structural control has potential for various applications. When this charge sense is used with a voltage drive for the charge control, the applied voltage will include two parts. Design and control of a selfsensing piezoelectric reticle. The piezoelectric effect is a characteristic of certain piezo crystals discovered by the french brothers p. Pi is a leading manufacturer of piezo drivers and motion controllers, which offer high linearity, high longterm stability and low power consumption. Piezoelectric self sensing actuators for high voltage. Driving piezoelectric actuators with fast periodic control signals causes. Pdf a selfsensing piezoelectric actuator for collocated. Selfsensing position control of piezoelectric actuators.
Piezoelectric mount actuator 16 bits p highaccuracy. Recent advances in nanorobotic manipulation inside. Compensation for the residual error of the voltage drive. This paper describes an approach to controlling the force generated by a piezoelectric actuator pea accurately without using any force sensor. A selfsensing piezoelectric actuator for collocated controlj. And the vibrationcancel circuit is configured to reduce or eliminate a level of the vibration. We use cookies to distinguish you from other users and to provide you with a better experience on our websites. In the past decades, selfsensing has gained attention in microengineering applications by enabling the design of compact devices with lower costs and simpler configurations. Selfsensing force control of a piezoelectric actuator. A piezoelectric actuator was bonded to a test beam and a circuit was contrived to measure piezostrain while the actuator was driven.
A detection model is deduced that allows computation in real time of the pea elon gation and generated force starting from the measurement of the driving voltage. The section 2 of the paper describes the experimental setup for the proposed control scheme. The proposed scheme of tracking control based on selfsensing feedback and inverse hysteresis compensator is described in section 5. Selfsensing actuation techniques allow the implementation of precise positioning control. The first actuator is the controlled actuator, and the second one is used as a dynamic controllable mechanical load. Modelbased fault diagnosis in rotor systems with selfsensing piezoelectric actuators am fachbereich maschinenbau. Position selfsensing in the presence of creep, hysteresis. Current measurement in control and monitoring of piezoelectric. Piezoelectric materials with direct and inverse effect, have been widely used in selfsensing techniques. Force estimation without the use of force sensors is accomplished with an. The sensor is mounted to the platform and is configured to generate a sense signal that represents a vibration induced e. Selfsensing actuator using ion polymer metal composite based on a neural network model.
Vibration active control based on torque actuator of. Selfsensing electrostatic drives are implemented by time division multiplexing, whereby the drive is switched between actuation and. Selfsensing is a technique that employs an actuator simultaneously as a sensor. Piezoelectric mount actuator capacitive displacement sensor ade8810 adc 20 bits dac 16 bits clk sr period estimation tracking control image data logging amplification board i out selfresonance control board v exc v out v in t sr piezo driver pi510. Unesco eolss sample chapters control systems, robotics, and automation vol. Chapter 4 selfsensing control of the piezoelectric actuator structure. Active multimodal vibration suppression of a flexible structure with piezoceramic sensor and actuator by using loop shapingj. The most recent application of this idea has been to piezoelectric actuators.
In the nanopositioning industry, prices continue to fall as resolution, linearity, and reliability improve. Josephine ruth d inspire faculty,robert bosch centre. Power electronics for piezoelectric and electrostrictive solidstate transducers. Piezoelectric networking for structural vibration control k. Piezoelectric or electrostrictive actuators can provide enormous force but are restricted in displacement. In this implementation, the displacement and force of a unimorph piezoelectric actuator are measured using a self sensing technique and one of these signals is utilized as feedback for a h1 feedback controller. Simultaneous displacementforce selfsensing in piezoelectric. The charge driver often uses an additional capacitor connected to the piezoactuator in series for the charge sense feedback control. The selfsensing solidstate actuator shown in fig ure 2d has the highest measure of integration and the simplest and thus economical con. Close this message to accept cookies or find out how to manage your cookie settings. Control of an experimental piezoelectric actuators system materials. Application of piezoelectric ceramics in structural health. Janocha encyclopedia of life support systems eolss selfsensing solidstate actuator. Selfsensing tracking control for piezoelectric actuators based on sensor fusion proceedings of spie sensors and smart structures technologies for civil, mechanical, and aerospace systems 2012, pts 1 and 2.
Design of a charge drive for reducing hysteresis in a. Kemets multilayer piezoelectric actuators are produced based on our unique element. A selfsensing piezoelectric actuator for collocated control article pdf available in journal of intelligent material systems and structures 31. Piezoelectric networking for structural vibration control. Selfsensing control using permittivity detection the selfsensing feedback control system was developed on the basis of the linear relationship between the permittivity change and the piezoelectric displacement. Improvement of selfsensing piezoelectric actuator control. Furthermore, the tip force, moment and angular velocity can also be estimated. A detection model is deduced that allows computation in real time of the pea elongation and generated force starting. We present a selfsensing control method of piezoelectric actuators that compensate the hysteresis characteristics by using the linear relationship between the permittivity change and the piezoelectric displacement.
It is derived from the basic piezoelectric equation that the free charge on the wafer of piezoelectric ceramic actuator contains displacement information. A lyapunovbased piezoelectric controller for flexible. When a mechanical force or pressure is released is applied to the piezoelectric body in its polarization direction, the piezoelectric body will generate a. Position selfsensing in the presence of creep, hysteresis, and self. Vibration control using piezoelectric actuators and. Micropower generation systems have gained considerable research attention due to the rapid development of microelectromechanical systems and wireless technologies. To model the actuators for control or selfsensing, they are often considered as capacitive elements.
Closedloop controllers are divided in two basic types. Decades of experience culminates in stateoftheart manufacturing technology of. Instrumente introduces a new piezoelectric solutions catalog, showcasing piezo components and materials, piezo actuators and transducers, and a piezo actuator tutorial. Pdf an overview of piezoelectric selfsensing actuation for. Switched selfsensing actuator for a mems nanopositioner. Selfsensing force control of a piezoelectric actuator article in ieee transactions on ultrasonics, ferroelectrics, and frequency control 5512. A force and displacement selfsensing piezoelectric mri. Openloop controllers are often referred to as piezo driver or even piezo power supply.
1629 267 1278 838 862 214 1374 998 704 878 246 1624 1441 808 307 826 920 753 1076 624 1250 426 1434 152 365 1638 35 836 83 1193 641 622 702 872 674 978 1376 1118 1204 1418 1156 1140 1204